MET ONE 6000P remote airborne particle counters deliver accurate and reliable continuous particle monitoring with a built-in vacuum pump, eliminating the need for costly and complex central vacuum systems. Compact with an integrated micro-processor controlled vacuum pump, this system provides ISO 21501 accuracy in cleanroom operations across a variety of cleanroom of industries including pharmaceutical, semiconductor, hard disk drive and flat panel display manufacturing.

  • Built-in pump for anywhere installation
  • No costly vacuum pump requirements
  • Online particle counting reliability
  • Integrated flow sensor for 21 CFR Part 11 data accuracy and reliability
  • 0.5 µm 1.0 cfm flow rate
  • Long-life laser diode for guaranteed continuous monitoring
  • Easy to integrate with any facility monitoring system
  • Multiple communication options including pulse, serial Modbus, Ethernet and analog

Documentation and Application Notes



  • Built-in flow sensor to assure proper air flow for sampling
  • 0.5 µm sensitivity for pharmaceutical and ISO Class 5 clean room monitoring 
  • Enables compliance with 21 CFR Part 11, FDA cGMP, and EU GMP Annex 1


  • Integrated or external status LED for fast troubleshooting and reduced downtime
  • Flow sensor improves operational reliability during continuous monitoring
  • Reduced downtime for instrument removal and re-installation for routine calibration/preventative maintenance


  • Multiple communication options for easy FMS integration
  • Built-in flow rate sensor controlled vacuum pump for lower installation cost and system complexity


  • Integrated pump improves reliability across the system – no single point of failure
  • Long life laser diode for guaranteed continuous monitoring

Product Specifications

Performance ISO 21501-4 unit-to-unit accuracy & reproducibility
Light Source Long Life Laser™ Diode
Particle Size Analysis Range 0.50|10.00|μm / 0.5|10|μm
Flow Rate 28.32 L per minute
Coincidence Loss 10% at 20,000,000 particles/m3
Sample Volume 10.00|µm
Throughput 28.32 L per minute
Zero Count ISO 21501-4 & JIS B 9921 (1 count or less in 5 min; 95% UCL)
Count Alarms Display and Cycles User-defined alarm counts displayed via LED on box or remote LED
Item Specifications Referenced 2088615-PF-EA


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