MET ONE 3411

As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. MET ONE 3411 portable air particle counters are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.

WPortable air particle counter for ISO 14464 cleanroom verification in ISO 1 and 2 environments.

  • 0.1 micron sensitivity (range 0.1 μm-1.0 μm)
  • Sequential sampling with optional collector
  • Fan inactive during operation to minimize particle impact
  • Simplified interface for area, location & operating parameter configuration/replication

 

Choose a MET ONE 3411 Model

Tech Docs Part Number Product Name Description Flow Rate Particle Size Analysis Range List Price Buy

Features

Standards

ISO 14644-1 Class 5 compliant sampling
ISO 21501-4 compliant for accurate process benchmarking & troubleshooting 

 

Data Management

• Wireless, Ethernet, Serial & USB communication
• Printed or paperless data output
• Open communication architecture

Operation

• Up to 6 particle size channels (2.83 LPM flow rate (0.1 CFM)
• Sequential sampling capability
• Long-life laser technology for improved performance & lower operating costs

Applications

Semiconductor cleanroom classification & monitoring
Continuous environmental monitoring
Process troubleshooting

 

Product Specifications

Performance ISO 21501-4 unit-to-unit accuracy & reproducibility
Industry Standards ISO 21501-4 , 21 CFR Part 11, ISO 14644-1:2015, FCC, CE
Light Source Helium neon laser
Particle Size Analysis Range 0.10|5.00|μm / 0.1|5|μm
Flow Rate 28.32 L per minute
Coincidence Loss % at 1,765,000 particles/m3 (per ISO 21501-4 method)
Sample Volume 5.00|µm
Throughput 28.32 L per minute
Reporting EU GMP (2015), ISO 146441-1.2015, FS209E, BS5295, ISO 14644-1:1999
Zero Count ISO 21501-4 & JIS B 9921 (1 count or less in 5 minutes; 95% Upper Confidence Limit)
Counting Efficiency 50% at 0.1 μm (100% for particles > 0.15 μm per ISO 21501-4 & JIS B 9921)
Count Alarms Display and Cycles User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode
Item Specifications Referenced 2088800-01

Technical Documents