MET ONE 3411

As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. MET ONE 3411 portable air particle counters are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.

With industry leading ISO 21501 accuracy, the compact MET ONE 3411 is the cleanest 0.1 μm portable air particle counter available for monitoring and resolving particle excursion events.

  • 0.1 micron sensitivity (range 0.1 μm-1.0 μm)
  • 21501 compliant for guaranteed unit-to-unit accuracy & reproducibility
  • Sequential sampling with optional collector
  • Fan inactive during operation to minimize particle impact
  • Simplified interface for area, location & operating parameter configuration/replication
 

 

 

Features

Standards

ISO 14644-1 Class 5 compliant sampling
ISO 21501-4 compliant for accurate process benchmarking & troubleshooting 

 

Data Management

• Wireless, Ethernet, Serial & USB communication
• Printed or paperless data output
• Open communication architecture

Operation

• Up to 6 particle size channels (2.83 LPM flow rate (0.1 CFM)
• Sequential sampling capability
• Long-life laser technology for improved performance & lower operating costs

Applications

Semiconductor cleanroom classification & monitoring
Continuous environmental monitoring
Process troubleshooting

 

 

Choose a MET ONE 3411 Model

Tech Docs Part Number Product Name Weight Height Power Requirements List Price Buy
15.9 kg (without battery)
23 cm / 9.1 in
24 VDC; 3.2A with 100-240 VAC; 50/60 Hz adapter (included in ship kit)

$25,400.00

Buy
15.9 kg (without battery)
23 cm / 9.1 in
24 VDC, 3.2 A with 100-240 VAC, 50/60 Hz adapter (included in ship kit)

$22,000.00

Buy
15.9
23 cm / 9.1 in
24 VDC, 3.2 A with 100-240 VAC, 50/60 Hz adapter (included in ship kit)

$22,800.00

Buy
15.9 kg (without battery)
23 cm / 9.1 in
24 VDC; 3.2A with 100-240 VAC; 50/60 Hz adapter (included in ship kit)

$25,500.00

Buy
15.9
23 cm / 9.1 in
24 VDC; 3.2A with 100-240 VAC; 50/60 Hz adapter (included in ship kit)

$26,300.00

Buy

Product Specifications

Channels/Standard Sizes 6 channels (0.1 µm, 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 5 µm)
Light Source Helium neon laser
Flow Rate 1.0 CFM (28.3 LPM)
Zero Count ISO 21501-4 & JIS B 9921 (1 count or less in 5 minutes; 95% Upper Confidence Limit)
Coincidence Loss % at 1,765,000 particles/m3 (per ISO 21501-4 method)
Industry Standards ISO 21501-4 , CE
Counting Efficiency 50% at 0.1 μm (100% for particles > 0.15 μm per ISO 21501-4 & JIS B 9921)
Count Alarms, Display & Cycles User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode
Data Storage 5000 samples
Interfaces & Protocols RS232, RS485, 802.11 b/g Wireless, 802.3 Ethernet, USB Client (v1.1) & USB Host (v1.1) interfaces, Protocol: Modbus TCP, Modbus RUT, Serial FX
Item Specifications Referenced 2088800-01