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Instruments

MET ONE 3411

MET ONE 3411 portable air particle counters are designed specifically for semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications. With industry leading ISO 21501 accuracy and reproducibility, the MET ONE 3411 is the cleanest 0.1um portable air particle counter in the market.

Benefits

Keeps your cleanroom clean
The only 0.1um particle counter without a dirty exhaust fan.

Hot-swappable batteries –100% instrument availability
Hot-swappable batteries eliminate the need to stop measuring while your instrument charges or for powering down, zero counting and powering back up.

Test wizard for easier compliance - organize your cleanroom
Save time and eliminate errors when monitoring your semiconductor production environments.

Sequential sampling - manifold system
Low cost site monitoring solutions can be deployed with the MET ONE Model 3432 manifold. Sample sequentially from up to 32 locations with a single MET ONE Model 3411 series particle counter.

Flexible communications – easy setup and data transfer
Reduce your paperwork with wireless, Ethernet and serial communication options to MET ONE Data Management or your own software solutions.

Intuitive user interface
Easily set up sampling plans by area, location and operating parameter, saving operator time. Eliminate setup errors and save time by exporting setup configuration to USB memory stick and deploy your sampling plan across your entire particle counting fleet!

ISO 21501-4 reliability and accuracy
Designed for exceptional particle counting performance providing ISO 21501-4 compliant unit-to-unit accuracy and reproducibility.

Applications

  • Cleanroom verification monitoring
  • Cleanroom classification
  • ISO 14644 cleanroom verification
  • Cleanroom particulate monitoring
  • Sequential monitoring of manufacturing processes
  • Process troubleshooting particle contamination sources
  • HEPA filter leak detection across 0.1, 0.15, 0.2, 0.3, 0.5 and 1um sizes
  • Filter scanning
  • High pressure gas monitoring with simple gas selection menu and automatic sample flow adjustment
 

Airborne Particle Counter Semiconductor Standards and Committees

Accessories

Included

Part Number Description
2087966-01 Isokinetic probe 1.00 CFM nickel plated aluminum 3/8” barbed fitting
960380 Tubing, sample, 3/8” ID, 10 ft
2088035-01 IsokineticProbe adapter, aluminum
970650 Tripod for Isokinetic-Probe
230-300-7052 Power Supply 24VDC output
VP623500 AC Power Cord, 72", 230V, BLACK
VP623501 Power Cord: 115VAC, 6' L
2087939-01 Zero count filter 1CFM
2087090 PortAll software, CD
460519 Printer paper, 2 rolls
280-120-2024 2 x Battery pack, Lithium Ion
210-400-5171 Touch screen stylus
2088010-01 USB memory drive 128M
410-150-0011 3 pin mini terminal block
410-420-0020 Back shell for 410-150-0011
490-200-0001 Wireless Antenna Included with wireless version P/N 2088800-02

Optional

Part Number Description
CAL_GAS_3411 GAS CALIBRATION, He, Ar, CO2, & N2 for model 3411
701241-01 IQ/OQ 3400 series Validation Documents (CD)
2087966-02 Isokinetic Probe, 1.0 CFM Stainless Steel, 3/8” barbed fitting
2089406-01 Isokinetic-Probe Stand
460519 Printer Paper (per roll)
280-300-5000 Smart Battery Charger
280-120-2024 Battery, Smart Lithium Ion
2088928 Temperature & Relative Humidity Probe Vaisala HMP50
2087939-01 Zero count filter 1.0 CFM
460-400-4798 Cable, USB 2.0, Hi Speed, 1 meter
2084045-02 Particle Vision PortAll, version 2.0, Kit, download utility software, adapter and manual (serial cable must be purchased separately)
700011-21 PortAll License Standard Edition
2088000-01 Filter scanning probe (with electronics) 1 CFM
2088000-02 Filter scanning probe (without electronics) 1 CFM
2088012-02 Adapter, USB to RS-232, USB cable, DB-9 null modem and Modbus register map
2088012-01 Adapter, USB to RS-485, USB cable and Modbus register map
2080732-8 High Pressure Diffuser for use with 1.0 CFM units

Specifications

Spec Value
Number of Size Channels 6
Particle Sizes 0.1, 0.2, 0.3, 0.5, 1.0, 5.0µ
Light Source Helium Neon Laser
Weight Without battery: 15.9 kg (35 lbs), Battery: 0.66 kg (1.45 lbs)
Dimensions 33 W x 55.9 D x 22.9 H cm (13 x 22 x 9 inches)
Enclosure Easy to clean Stainless Steel
Flow Rate 1.0 CFM (28.3 LPM)
Zero Count ISO 21501-4 and JIS B 9921: 1 count or less in 5 minutes, 95% UCL
Coincidence Loss 5% at 50,000 /ft3 per ISO 21501-4 method
Pump Patented multi-lobe closed loop controlled rated for continuous use
Counting Efficiency 50% at 0.1 μm; 100% for particles > 0.15 μm per ISO 21501-4 and JIS B 9921
Operating Temperature 10° to 40°C (50° to 104°F); 10 to 90% relative humidity, non-condensing
Display ¼ VGA Color TFT touch screen
Printer High speed thermal
Language English, French, German, Italian, Spanish, Korean*, Japanese*, Chinese
Maximum Count Displayed 9,999,999 displayed
Delay Time 15 seconds to 23 hours 59 minutes 59 seconds
Sample/Hold Times 1 second to 23 hours 59 minutes 59 seconds
Count Alarms 1 to 9,999,999 counts
Locations ID: 0 to 999; NAME: Alphanumeric, appears on printout
Data Storage 5,000 samples, scrollable on Historical Data review screen (FIFO or Overflow)
Outputs USB Client (Version 1.1) USB Host (Version 1.1) RS-485 Ethernet with TCP/IP protocol Wireless with 802.11g protocol (optional) Met One 3432 manifold Auxiliary (alarm and scan probe)
Communication Protocol Modbus TCP , Modbus RTU , Serial FX
Inputs Air Velocity Probe, RH/Temperature Probe
Auto CDA Purge Purge solenoid activated by connection to Clean Dry Air source
Power 24 VDC with 100-240 VAC, 50/60 Hz adapter
Battery Type Lithium ion smart battery; rechargeable, ejectable, and hot-swappable
Battery Operating Time 3 hours minimum
Battery Recharge Time 6.75 hours minimum, 10 hours maximum
Battery Quantity Included 2 each

Videos

  • Wireless Electronic Records for Cleanroom Routine Environmental Monitoring

    Click to play  

  • Webinars & Symposiums

  • Optimizing Quality Control Electronic Records for 21 CFR Part 11 Compliance

    Tony Harrison Senior Marketing Manager, Beckman Coulter

    Click to play  

    The FDA’s 21 CFR Part 11 guidance on the use of electronic records for data retention or submission is clear. With manually implemented Standard Operating Procedures for Quality Control testing and manual transcription of the test results...

  • Particle Counters Must Now be Calibrated With ISO 21501-4 - Do Your Instruments Comply?

    Joe Gecsey

    Click to play  

    Changes in the classification standard, ISO 14644-1:2015, will have an impact on both the number of sample points needed to classify and on the quality and maintenance of the instruments needed to comply. The impact of the latest revision...

  • The revised ISO 14644-1 changes classification and monitoring methods - Are you prepared?

    Joe Gecsey Life Science Application Manager, Beckman Coulter, Particle Counting and Characterization

    Click to play  

    This webinar, presented by one of the US members to the international revision group, discusses how the newly-revised ISO 14644-1 and -2 standard for counting airborne particles in cleanrooms may impact your classification and monitoring...

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